장비부품 (56종류) |
- Air Stage |
- ARM |
- Asher |
- Bellow |
- Boat |
- Canister |
- Chamber |
- Chuck |
- CMP |
- Crucible |
- CVD |
- Degasser |
- Electro Plating |
- Electrode |
- Epitaxy |
- E.S.C |
- Generator |
- Heater |
- Hot Plate |
- Hot Zone |
- Ion Implant |
- Isolator |
- LFP Belt |
- Liner |
- Mass Flow Controller |
- MOCVD |
- Motor |
- Multi Pin |
- O-Ring |
- Outer |
- Pedestal |
- Photomask |
- Probe |
- Pump |
- PVD |
- Reactor |
- Ring |
- RTP |
- Stepper |
- Thermocouple |
- Tube Fitting |
- Vacuum |
- Valve |
- Vaporizer |
- Wafer Guide |
Parts Number |
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